In English

Straight silicon tube for density and mass flow sensing (fabrication, modeling and evaluation)

Mohammad Najmzadeh ; Sjoerd Haasl ; Peter Enoksson
Göteborg : Chalmers tekniska högskola, 2007. 170 s.
[Examensarbete på avancerad nivå]

The aim of this project work is to fabricate and evaluate a resonating silicon tube as a density and a Coriolis mass flow sensor. This project consists of three course works: a project work, a microelectronics project, and a master thesis. At first, the licenses needed to work with the clean room facilities were obtained. Several process steps were optimized/calibrated and finally, the first prototypes were fabricated. The fixtures and the electrodes were prepared. A quantitative model for the density/Coriolis mass flow sensor was derived. Several parameters like density sensitivity, pull-in-voltage, Q-factor, resonance frequency, burst pressure, the amplitude of Coriolis effect were investigated/formulated/calculated. An electrical-optical setup was prepared to evaluate the tube as a density sensor. The first three vibration modes were calibrated and the important parameters of a densitometer, quality factor and fluid density sensitivity, were measured. Several sources of loss were investigated. The effect of viscosity and flow were investigated and finally, the results were published in a journal paper and two conference papers. An optical-electrical setup was designed and implemented to detect the Coriolis effect using geometrical optics and MATLAB calculations. Detecting this effect and evaluating the mass flow sensor are the next steps.

Nyckelord: MEMS, microfluidics, Coriolis mass flow sensor, density sensor, fabrication, modeling, evaluation.

Publikationen registrerades 2007-11-09. Den ändrades senast 2013-05-03

CPL ID: 61575

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