In English

MEMS exural hinge and com- pliant mechanism for electromechan- ical microgrippers

Göteborg : Chalmers tekniska högskola, 2013. 62 s. Technical report MC2 - Department of Microtechnology and Nanoscience, Chalmers University of Technology, ISSN 1652-0769, 2013.
[Examensarbete på avancerad nivå]

Microrobots are used nowadays in several elds of application for many di erent functions. Unfortunately, their manufacture involves some diculties as the micrometer scale is out of reach of the traditional machining tools. Consequently, lithographic and etching processes are adopted to achieve high aspect ratios and awless fabrication of the smallest features. The Microrobots under discussion consist in two di erent kinds of Microgrippers. One has an electrostatic actuation due to two MEMS comb drives that provide the attraction needed to bend a hinge. The other has a di erent geometry, including two rings connected to metal wires. Forces applied to them result in the bending of 8 hinges that provide the opening and closing motion of the Microgripper. The size of the objects that can be grabbed spreads from 5 m up to 170 m, as in the largest embodiment. The main innovation introduced by the designs presented is a circular hinge, whose thickness ranges from 5 to 18 m. Through its elastic bending it causes the circular motion of the structure. Many aspects make this kind of hinge ideal for MEMS: small size, sole-component, reliability in peculiar environments, lack of friction and wear etc. . . Ideal elds of application are high-precision pick-and-place operations, sample preparation, microassembly, micro-object sorting in both high and low pressure environment, as well as vacuum.

Publikationen registrerades 2014-01-18.

CPL ID: 192853

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