In English

Rattlesnake nanoactuator - a precision high speed closed loop linear actuator with capacitive sensor

Jonathan Lock
Göteborg : Chalmers tekniska högskola, 2011. 206 s.
[Examensarbete på avancerad nivå]

This thesis describes the development of a novel linear actuator based on a closed loop tightly integrated magnetic motor and capacitive sensor. Mechanical, electrical and software work has resulted in a device achieving a mechanical range of travel of ±1mm with a steady state RMS error of 62nm at a closed loop bandwidth of 3.5kHz, a typical tracking error of hundreds of nanometers (dependent on the waveform shape) and a maximum error in the range of 1 − 10μm. The stiffness of the system at 10Hz is 4N/μm and the actuator has a useful range of motion up to 300 − 500Hz with reduced travel at these speeds due to force limitations. This is possibly an area of continued work; minor modifications could lead to an RMS error of ≈ 20nm, making it possible to outperform piezoelectric actuators in some applications such as adaptive optics or interferometry.

Publikationen registrerades 2011-11-14. Den ändrades senast 2017-10-03

CPL ID: 148429

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